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SEM-Raman system

SEM-Raman gives you comprehensive in situ sample characterisation in a single system. Redefine convenience, efficiency and productivity by combining these two technologies.

Renishaw's structural and chemical analyser (SCA) interface brings inVia's Raman analysis capabilities to scanning electron microscopes (SEM).

Raman + SEM

inVia and the SCA interface provide an in-SEM analytical technique that both complements light microscope-based Raman spectroscopy and overcomes the limitations of energy-dispersive x-ray spectroscopy (EDS), the traditional in-SEM analytical technique. With Renishaw's SEM-Raman system, you'll benefit from co-located morphological, elemental, chemical, physical and electronic analysis.

Use the SEM to take high-resolution images of your sample and perform elemental analysis. Add the power of Raman to obtain chemical information on your sample and identify materials and non-metallic compounds, even when they have the same stoichiometry.

The SCA and inVia are fully compatible with not only Raman but also photoluminescence (PL) and cathodoluminescence (CL) spectroscopies.

One combined system for co-located analysis

With one combined system, you save valuable time. You do not have to move your samples between two instruments and risk analysing the wrong sample region.

Both the inVia and SEM can be operated as stand-alone systems, at the same time, without compromising the performance of either. You have a Raman system, a SEM system and a combined Raman-SEM system.

Same place, same time

Have confidence in your data; simultaneously acquire Raman and SEM data from the same point on the sample without having to move it. This ensures analysis is rapid and that your data are representative.

Choose the best system

Renishaw's SCA interface can be added to your existing SEM. It is mounted on a port, so it does not require the SEM to be modified in any way. The SCA has been installed on SEMs from all major vendors, including:

  • Zeiss
  • FEI
  • JEOL
  • Hitachi

Find out more

Recent news

Renishaw Raman system used with SEM to study fibres at UCLA

The University of California, Los Angeles (UCLA), USA, combines Raman microscopy with scanning electron microscopy (SEM) to study archaeological textiles and fibres.

Renishaw adds Raman analysis to Scanning Electron Microscopy at the University of Sydney

Dr Elizabeth Carter is Manager of the Vibrational Spectroscopy Core Facility, VSCF, at the University of Sydney. This professional services unit houses one of the largest concentrations of state-of-the-art Raman and FT-IR spectrometers in Australia.

Selecting the best system

Contact Renishaw's SEM experts and discuss your specific requirements.